8-Inch SIC 저항 가열 이중 히터 단결정 성장로
설명
리뷰
8-Inch 결정 성장 장비는 고품질 4H-N형 탄화규소 결정 성장을 위해 설계된 첨단 솔루션입니다. 저항 가열 기술과 정밀 온도장 제어를 통합하여 결정 생산의 높은 효율과 균일성을 보장합니다.
장비의 기술 사양：
|
System |
Item |
Specification |
|
Power Supply |
|
3-phase 380V 50Hz |
|
Vacuum Chamber |
Diameter × Height |
900mm × 1100mm |
|
|
Rated Power |
30kW, 50kW |
|
|
Rated Input Current |
130A |
|
High Precision 3-Phase AC Power Supply |
Rated Input Voltage |
3-phase 380VAC, 50Hz |
|
|
Rated Output I Current & Voltage |
1443A, 12V |
|
|
Rated Output II Current & Voltage |
1519A, 19V |
|
Vacuum System |
Ultimate Vacuum |
Chamber ultimate vacuum < 1 × 10⁻³ Pa |
|
|
System Holding Pressure |
Room temperature furnace, leak rate < 10 Pa within 12h |
|
Heating Temperature |
Maximum Temperature |
2400°C |
|
Temperature Measurement |
Range |
1000–3000°C |
|
Gas System |
Gas Supply Lines |
2–Ar, N₂ |
|
|
Control Accuracy |
≤ ±2% |
|
Pressure Control System
|
Pressure Range |
50 Pa ~ 80 kPa |
|
|
Control Accuracy (50Pa ≤ P ≤ 500Pa) |
≤ ±5 Pa |
|
Temperature Control System
|
Control Mode |
Power control, accuracy ±20W |
|
|
Control Range |
1000–2500°C |
|
|
Control Accuracy |
±5°C |
|
Water Cooling System |
Inlet Water Pressure |
>0.3 MPa (design pressure 0.5 MPa) |
|
|
Inlet Water Temperature |
25°C ± 1°C |
|
|
Outlet Water Temperature |
<40°C |
